Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140342 | Makeup air handling unit in semiconductor fabrication building and method for cleaning air using the same | Tzu-Sou Chuang | 2024-11-12 |
| 12062535 | Particle removal method in semiconductor fabrication process | Po-Cheng Chen, DENG-AN WANG | 2024-08-13 |
| 11892382 | Method for detecting environmental parameter in semiconductor fabrication facility | Tzu-Sou Chuang | 2024-02-06 |