Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080545 | Showerhead assembly and method of servicing assembly for semiconductor manufacturing | Po-Wei Wang, Hsiao-Feng Lu | 2024-09-03 |
| 11885008 | Film forming apparatus and method for reducing arcing | Po-Wei Wang | 2024-01-30 |