Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11990362 | Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body | Nobuhiro Hidaka, Megumi Ootomo | 2024-05-21 |