TH

Toru Hirata

TL Tokyo Electron Limited: 1 patents #284 of 870Top 35%
Overall (2024): #238,451 of 561,600Top 45%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11955365 Substrate processing method and substrate processing apparatus Yoshinori Ikeda 2024-04-09