Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12104245 | Compound, thin-film forming raw material that contains said compound, and method of manufacturing thin film | Atsushi Sakurai, Masako HATASE, Masaki ENZU, Keisuke Takeda, Ryota FUKUSHIMA | 2024-10-01 |
| 12020943 | Substrate processing method and substrate processing apparatus | Koji Kagawa | 2024-06-25 |
| 11945029 | Cold flake suppression method | Takeshi Okada | 2024-04-02 |