Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174537 | Salt, acid generator, resist composition and method for producing resist pattern | Satoshi Yamamoto, Koji Ichikawa | 2024-12-24 |
| 11947257 | Salt, acid generator, resist composition and method for producing resist pattern | Satoshi Yamaguchi, Koji Ichikawa | 2024-04-02 |