Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183600 | Method of determination of pretreatment conditions of heat treatment furnace, method of pretreatment of heat treatment furnace, heat treatment device, and manufacturing method and manufacturing device of heat-treated semiconductor wafer | — | 2024-12-31 |