Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12129543 | Epitaxial growth apparatus and method of producing epitaxial wafer | Haku KOMORI | 2024-10-29 |
| 11984346 | Susceptor, epitaxial growth apparatus, method of producing epitaxial silicon wafer, and epitaxial silicon wafer | — | 2024-05-14 |