| 12117608 |
MEMS micromirror device enveloped in a package having a transparent surface and having a tiltable platform |
Roberto Carminati, Massimiliano MERLI, Enri Duqi |
2024-10-15 |
| 12084341 |
MEMS device having an improved stress distribution and manufacturing process thereof |
Lorenzo VINCIGUERRA, Roberto Carminati, Massimiliano MERLI |
2024-09-10 |
| 12066621 |
MEMS device with tiltable structure and improved control |
Roberto Carminati, Andrea Barbieri, Marco Zamprogno, Luca Molinari |
2024-08-20 |
| 12043540 |
Micro-electro-mechanical device with a shock-protected tiltable structure |
Roberto Carminati, Massimiliano MERLI |
2024-07-23 |
| 11953813 |
Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics |
Roberto Carminati, Massimiliano MERLI |
2024-04-09 |
| 11933966 |
Resonant MEMS device having a tiltable, piezoelectrically controlled micromirror |
Roberto Carminati, Massimiliano MERLI |
2024-03-19 |
| 11933968 |
Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics |
Roberto Carminati, Massimiliano MERLI |
2024-03-19 |