Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11897005 | Nozzle, substrate processing apparatus including the same, and substrate processing method | Oh Jin Kwon, Sehyeong Choi | 2024-02-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11897005 | Nozzle, substrate processing apparatus including the same, and substrate processing method | Oh Jin Kwon, Sehyeong Choi | 2024-02-13 |