Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074030 | Etching method of oxide semiconductor film, oxide semiconductor workpiece, and electronic device | Masanaga Fukasawa | 2024-08-27 |
| 12062548 | Etching method for oxide semiconductor film | Tetsuya Tatsumi, Masanaga Fukasawa, Satoshi Hamaguchi, Kazuhiro Karahashi | 2024-08-13 |