Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025912 | Phase shift mask for EUV lithography and manufacturing method for the phase shift mask | — | 2024-07-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025912 | Phase shift mask for EUV lithography and manufacturing method for the phase shift mask | — | 2024-07-02 |