Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11919122 | Polishing head, substrate processing apparatus including the same and processing method of substrate using the same | Seung Bae Kang, Sung-hyeon Park, Jung Gun Nam, Joon-Hwa Bae, Kyung Bo LEE +2 more | 2024-03-05 |