Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087606 | EFEM and method of controlling supply amount of inert gas | Masahiro Osawa | 2024-09-10 |
| 12055220 | Sealing equipment | Gengoro Ogura | 2024-08-06 |
| 12027398 | EFEM | Gengoro Ogura | 2024-07-02 |
| 12002693 | EFEM | Gengoro Ogura | 2024-06-04 |