Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080583 | Base plate and substrate fixing device | Ken Sato, Tatsuya Nakamura | 2024-09-03 |
| 11909335 | Electrostatic chuck and substrate fixing device | Takashi Onuma | 2024-02-20 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080583 | Base plate and substrate fixing device | Ken Sato, Tatsuya Nakamura | 2024-09-03 |
| 11909335 | Electrostatic chuck and substrate fixing device | Takashi Onuma | 2024-02-20 |