Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125733 | Substrate fixing device, electrostatic chuck and method of manufacturing electrostatic chuck | — | 2024-10-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125733 | Substrate fixing device, electrostatic chuck and method of manufacturing electrostatic chuck | — | 2024-10-22 |