Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165886 | Substrate processing apparatus and substrate processing method | Daisuke Matsushima, Masaya KAMIYA | 2024-12-10 |
| 12138671 | Substrate treatment device | Minami NAKAMURA, Daisuke Matsushima | 2024-11-12 |
| 12109597 | Substrate treatment device | Daisuke Matsushima, Satoshi Nakamura, Masaya KAMIYA, Minami NAKAMURA | 2024-10-08 |
| 12097541 | Substrate processing apparatus | Daisuke Matsushima, Masaya KAMIYA | 2024-09-24 |
| 12074055 | Substrate treatment device | Masaya KAMIYA | 2024-08-27 |
| 12005482 | Substrate treatment device | Daisuke Matsushima, Masaya KAMIYA | 2024-06-11 |
| 11948812 | Cooling device, substrate treatment device, cooling method, and substrate treatment method | — | 2024-04-02 |