Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12124169 | Nozzle standby port, apparatus for treating substrate including the same and method for cleaning nozzle using the same | Ki Sang EUM, Chang Suk OH | 2024-10-22 |
| 12055866 | Cleaning jig, substrate treating apparatus including the same, cleaning method of substrate treating apparatus | Kisang Eum, Chang Suk OH | 2024-08-06 |