Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181504 | Apparatus and method for inspecting electrostatic chuck | Su Hyung Lee, Ga Yeon Kim, Sung Ho Lee | 2024-12-31 |
| 11964309 | Substrate treatment apparatus and method | Sung Hun EOM, Sung Ho Lee | 2024-04-23 |