Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11986967 | Apparatus for treating substrate and method for detecting state of substrate | Tae Kyung Kong | 2024-05-21 |
| 11935779 | Transfer hand and substrate processing apparatus with conductive ring and tilting vacuum pad | Tae Hoon Lee, Ju Won Kim, Bo Hee LEE | 2024-03-19 |