Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11986867 | Substrate processing method and substrate processing apparatus | Shohei Nakamura, Shigeru Takatsuji, Motohiro Kono, Takahiro Kimura, Kenji Kobayashi | 2024-05-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11986867 | Substrate processing method and substrate processing apparatus | Shohei Nakamura, Shigeru Takatsuji, Motohiro Kono, Takahiro Kimura, Kenji Kobayashi | 2024-05-21 |