Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11921421 | Overlay correcting method, and photolithography method, semiconductor device manufacturing method and scanner system based on the overlay correcting method | Jeongjin Lee, Minseok Kang, Chan Hwang | 2024-03-05 |