Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11927890 | Substrate processing apparatus and method of fabricating semiconductor device using the same | Seok Heo, Cha-Won Koh, Hyun-Woo Kim, Kyung Won Kang, Dong Wook Kim +3 more | 2024-03-12 |