Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11908725 | Electrostatic chuck heater and manufacturing method therefor | Jin Young Choi, Ju Sung LEE | 2024-02-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11908725 | Electrostatic chuck heater and manufacturing method therefor | Jin Young Choi, Ju Sung LEE | 2024-02-20 |