Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068141 | Ring assembly, substrate support apparatus and plasma processing apparatus including the same | Sungki Lee, Sungkyu Choi | 2024-08-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068141 | Ring assembly, substrate support apparatus and plasma processing apparatus including the same | Sungki Lee, Sungkyu Choi | 2024-08-20 |