Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174553 | Support unit, bake apparatus and substrate treating apparatus including the same | Tae Hoon Lee, Ki Sang EUM | 2024-12-24 |
| 12170191 | Substrate supporting apparatus and substrate treating apparatus including the same | So Hyung Jiong, Hyung Joon Kim | 2024-12-17 |