Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948814 | Valve structure and substrate processing apparatus including the same | Kangmin Park, Hyungho Kim, Dongwoo Wi, Hyunsoo Chun | 2024-04-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948814 | Valve structure and substrate processing apparatus including the same | Kangmin Park, Hyungho Kim, Dongwoo Wi, Hyunsoo Chun | 2024-04-02 |