Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11977338 | Defocus measurement method, correction method, and method of manufacturing semiconductor device by using the correction method | Jieun Park, Youngmin SEO | 2024-05-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11977338 | Defocus measurement method, correction method, and method of manufacturing semiconductor device by using the correction method | Jieun Park, Youngmin SEO | 2024-05-07 |