Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002651 | Voltage waveform generator, wafer processing apparatus and plasma processing apparatus | Hyejin Kim, Chanhee Park | 2024-06-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002651 | Voltage waveform generator, wafer processing apparatus and plasma processing apparatus | Hyejin Kim, Chanhee Park | 2024-06-04 |