Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130552 | Composition for resist underlayer, and pattern forming method using same | Yoojeong CHOI, Soonhyung Kwon, Minsoo Kim, Shinhyo BAE, Jaeyeol BAEK | 2024-10-29 |
| 11987561 | Resist underlayer composition, and method of forming patterns using the composition | Yoojeong CHOI, Soonhyung Kwon, Jaeyeol BAEK, Minsoo Kim, Shinhyo BAE +2 more | 2024-05-21 |
| 11982943 | Method of forming patterns using resist underlayer composition | Jaeyeol BAEK, Shinhyo BAE, Yoojeong CHOI, Soonhyung Kwon | 2024-05-14 |