Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11990361 | Electrostatic chuck, etching apparatus, and method of manufacturing display device | Tae Hun Kim, Do Hwan Kim, Jae Han Kim, Seung-Ho Myoung, Dae-Young Oh +1 more | 2024-05-21 |