Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183591 | Etching gas compositions, methods of forming micropatterns, and methods of manufacturing semiconductor device | Dohoon Kim, Wonwoong Chung, Taehyung Kim, Heejun Park, Heonjong Jeong +2 more | 2024-12-31 |