Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12172313 | Substrate processing apparatus and substrate alignment method using the same | Minyoung Kang, Sungsoo Kim, Sohee KIM, Yongsoo Yoo | 2024-12-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12172313 | Substrate processing apparatus and substrate alignment method using the same | Minyoung Kang, Sungsoo Kim, Sohee KIM, Yongsoo Yoo | 2024-12-24 |