Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112948 | Method of manufacturing integrated circuit device using a metal-containing photoresist composition | Soyeon Yoo, Sooyoung Choi, Tsunehiro Nishi, Kwangsub Yoon, Brian J. Cardineau +1 more | 2024-10-08 |
| 11923209 | Substrate processing apparatus and substrate processing method | Hyunwoong Hwang, Seok-Won Heo, Hyunwoo KIM | 2024-03-05 |