Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11866823 | Substrate supporting unit and a substrate processing device including the same | Seunghwan Lee, HakYong Kwon, Jongsu Kim, JuHyuk Park | 2024-01-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11866823 | Substrate supporting unit and a substrate processing device including the same | Seunghwan Lee, HakYong Kwon, Jongsu Kim, JuHyuk Park | 2024-01-09 |