Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11975964 | Method for manufacturing a microelectromechanical structure and microelectromechanical structure | Jochen Reinmuth | 2024-05-07 |
| 11940618 | Micromechanical component and method for producing a micromechanical component | Alexander Eberspaecher, Frank Schatz, Janine Riedrich-Moeller, Joerg Muchow, Josip Mihaljevic +2 more | 2024-03-26 |