Issued Patents 2024
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163851 | Micromechanical component for a sensor device having a capacitor sealing structure | Heribert Weber | 2024-12-10 |
| 12160215 | Method for manufacturing a piezoelectric resonator | Friedjof Heuck, Marcus Pritschow, Markus Kuhnke, Ricardo Zamora, Sebastien Loiseau +3 more | 2024-12-03 |
| 12151936 | Micromechanical component for a sensor device or microphone device | Heribert Weber, Andreas Scheurle, Christoph Hermes, Thomas Friedrich | 2024-11-26 |
| 12030773 | Method for producing a wafer connection | Friedjof Heuck, Jochen Tomaschko, Thomas Friedrich, Volkmar Senz, Franziska Rohlfing | 2024-07-09 |
| 11978658 | Method for manufacturing a polysilicon SOI substrate including a cavity | Jochen Reinmuth | 2024-05-07 |
| 11976996 | Micromechanical component for a capacitive pressure sensor device | Thomas Friedrich, Christoph Hermes, Hans Artmann, Heribert Weber, Volkmar Senz | 2024-05-07 |
| 11940345 | Micromechanical component for a capacitive pressure sensor device | Thomas Friedrich, Christoph Hermes, Hans Artmann, Heribert Weber, Volkmar Senz | 2024-03-26 |
| 11933689 | MEMS capacitive sensor including improved contact separation | Heribert Weber, Christoph Hermes, Hans Artmann, Thomas Friedrich, Volkmar Senz | 2024-03-19 |
| 11912563 | Micromechanical component and method for manufacturing a micromechanical component | Hans Artmann, Christoph Hermes, Heribert Weber, Jochen Reinmuth, Thomas Friedrich | 2024-02-27 |
| 11905166 | Production method for a micromechanical component | Heribert Weber, Thomas Friedrich, Andreas Scheurle, Joachim Fritz, Sophielouise Mach | 2024-02-20 |