Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180578 | RF sputtering apparatus for controlling atomic layer of thin film | Se-Young Jeong, You Sil Lee, Su Jae Kim, Sang-Eon Park | 2024-12-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180578 | RF sputtering apparatus for controlling atomic layer of thin film | Se-Young Jeong, You Sil Lee, Su Jae Kim, Sang-Eon Park | 2024-12-31 |