Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12110588 | Adjustable fluid inlet assembly for a substrate processing apparatus and method | Timo Malinen, Marko PUDAS | 2024-10-08 |
| 12112927 | Substrate processing apparatus and method | — | 2024-10-08 |