Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040198 | Inner wall and substrate processing apparatus | Atsushi Tanaka, Hiroyuki Ogawa | 2024-07-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040198 | Inner wall and substrate processing apparatus | Atsushi Tanaka, Hiroyuki Ogawa | 2024-07-16 |