Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009175 | Charged particle beam writing apparatus | Hirofumi Morita | 2024-06-11 |
| 11908659 | Multi charged particle beam writing apparatus | Toshiki Kimura, Hirofumi Morita, Mitsuhiro Okazawa | 2024-02-20 |