Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869796 | Electrode-embedded member and method for manufacturing same, electrostatic chuck, and ceramic heater | — | 2024-01-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869796 | Electrode-embedded member and method for manufacturing same, electrostatic chuck, and ceramic heater | — | 2024-01-09 |