Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087576 | Composition for forming coating film and method for manufacturing semiconductor device | Tokio NISHITA, Rikimaru Sakamoto, Takahiro Kishioka | 2024-09-10 |
| 12072631 | Resist underlayer film-forming composition and method for forming resist pattern using the same | Shou SHIMIZU, Ryuta MIZUOCHI, Hiroyuki Wakayama | 2024-08-27 |
| 12030974 | Composition for forming block copolymer layer for formation of microphase-separated pattern | Ryuta MIZUOCHI, Hiroyuki Wakayama, Masami Kozawa, Shinsuke TADOKORO | 2024-07-09 |