Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12084592 | Coating composition for pattern inversion | Hiroaki Yaguchi, Makoto Nakajima, Yuki Endo, Shuhei Shigaki | 2024-09-10 |
| 11966164 | Semiconductor device production method employing silicon-containing resist underlayer film-forming composition including organic group having ammonium group | Hayato HATTORI, Ken ISHIBASHI, Makoto Nakajima | 2024-04-23 |