Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12121847 | Gas treatment method and gas treatment device | — | 2024-10-22 |
| 12119233 | Etching method | — | 2024-10-15 |
| 12014929 | Etching method for silicon nitride and production method for semiconductor element | — | 2024-06-18 |
| 11972955 | Dry etching method, method for manufacturing semiconductor element, and cleaning method | — | 2024-04-30 |