Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170190 | Wafer support table and RF rod | Tomohiro HARA | 2024-12-17 |
| 11956863 | Multi-zone heater | Nobuyuki Kondou | 2024-04-09 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170190 | Wafer support table and RF rod | Tomohiro HARA | 2024-12-17 |
| 11956863 | Multi-zone heater | Nobuyuki Kondou | 2024-04-09 |