Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12116664 | Transport carrier, deposition apparatus, and electronic device manufacturing apparatus | Shigeyuki Ogawa, Takumi Shibata, Kazuo Akita | 2024-10-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12116664 | Transport carrier, deposition apparatus, and electronic device manufacturing apparatus | Shigeyuki Ogawa, Takumi Shibata, Kazuo Akita | 2024-10-15 |