Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11999615 | Nitride piezoelectric body and MEMS device using same | Kenji Hirata, Hiroshi Yamada, Masato Uehara, Sri Ayu Anggraini | 2024-06-04 |
| 11968902 | Piezoelectric body and MEMS device using same | Masato Uehara, Hiroshi Yamada, Sri Ayu Anggraini, Kenji Hirata | 2024-04-23 |