Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11947241 | Long sweep length DUV microlithographic beam scanning acousto-optical deflector and optics design | — | 2024-04-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11947241 | Long sweep length DUV microlithographic beam scanning acousto-optical deflector and optics design | — | 2024-04-02 |