Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862470 | Silica particle and production method therefor, silica sol, polishing composition, polishing method, method for producing semiconductor wafer and method for producing semiconductor device | Tomohiro KYOTANI, Eiji DEJIMA, Naoko Sumitani, Tomohiro Kato | 2024-01-02 |